Study the Structural Properties of Nano Films of Titanium Dioxide

  • Hassan Rasim Mohammed, Mohammed Hadi Shinen


In this study, Titanium dioxide was prepared from three Chemical materials: titanium isopropoxide , acetic acid and ethanol alcohol using a sol-gel method. Thin films were prepared by Spin Coating technology on glass slides at room temperature with three speed of depositions (1000, 2000, 3000)rpm. The prepared films were annealed at 550 °C to obtain anatase phase. The results of X-ray diffraction (XRD) for the prepared films Observed that anatase phase is the predominant phase when annealing the films at a temperature of 550 °C. The surface topography of the thin films was tested using a scanning electron microscope (SEM) technique. Observed that all the films had good homogeneity, and that the roughness rate and the rate of grain size increased with increasing speed of deposition.